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Research Unit
NaMiFab - Cleanroom Facility for Nano- and MicroFabrication
Information
Members
Infrastructure
01 January 2005 → …
PDMS vacuum chamber
Equipment
01 January 2002 → …
Vapour phase reflow oven
Equipment
01 January 2005 → …
Multi-purpose oven
Equipment
01 January 2000 → …
Reactive Ion Etcher (RIE)
Equipment
01 January 1995 → …
Oxygen plasma etcher
Equipment
01 January 2004 → …
Screen printer
Equipment
01 January 2006 → …
Quartz tube furnace
Equipment
01 January 1995 → …
Digital microscope - Optiphot
Equipment
01 January 1995 → …
Profilometer
Equipment
01 January 2021 → …
Parylene coater
Equipment
01 January 2019 → …
Thermal Atomic Layer Deposition system (ALD)
Equipment
01 January 2012 → …
Direct-write lithography system (LDI)
Equipment
01 January 2010 → …
UV source large
Equipment
01 January 2013 → …
Aerosol Jet printing system
Equipment
01 January 2014 → …
Multi-purpose oven
Equipment
01 January 2011 → …
Cross section polisher
Equipment
01 January 2011 → …
Laser micromachining system (3dmm)
Equipment
01 January 2012 → …
PDMS spinner
Equipment
01 July 2012 → …
Double-sided PCB UV exposure unit
Equipment
01 January 2000 → …
Sputter/Carbon Coater System for SEM samples
Equipment
01 January 2009 → …
Contact angle measurement system
Equipment
01 January 2008 → …
Optical profilometer - Wyko
Equipment
01 January 2010 → …
Liquid crystal cell filling setup
Equipment
01 January 1995 → …
RF-sputtering unit
Equipment
01 January 2008 → …
Wafer substrade bonding unit
Equipment
01 January 2010 → …
LC cell end seal press
Equipment
01 January 2005 → …
PDMS curing Oven
Equipment
01 January 2012 → …
Plasma Enhanced Chemical Vapor Deposition system (PECVD)
Equipment
01 July 2020 → …
Multi-Wavelength Ellipsometer
Equipment
01 January 2007 → …
Plasma surface treatment system
Equipment
01 January 2006 → …
Oven with nitrogen flush
Equipment
01 January 2010 → …
UV source small
Equipment
01 January 2013 → …
Flex PCB Processing Line
Equipment
01 January 2005 → …
Thermal/e-gun evaporation unit
Equipment
01 January 1995 → …
DC Magnetron sputtering unit
Equipment
01 January 2012 → …
Wafer dicer
Equipment
01 January 2007 → …
Materials printer
Equipment
01 January 2005 → …
Vacuum laminating press
Equipment
01 January 2005 → …
Vacuum alloying furnace
Equipment
01 January 2011 → …
Wafer bonder - EVG
Equipment
01 July 2025 → …
3D additive nanofabrication system
Equipment
01 January 2000 → …
Wedge bonder
Equipment
01 July 2015 → …
Field emission scanning electron microscope (FEG-SEM) + EDX
Equipment
01 January 2015 → …
Mask Aligner (double sided)
Equipment
01 July 2008 → …
Film Applicator System (doctor blade coating)
Equipment
01 January 2012 → …
Photopolymer dry film laminator
Equipment
01 January 2006 → …
Scanning Electron Microscope (SEM) + EDX
Equipment
01 January 2008 → …
Precision Lapping and Polishing System
Equipment
01 January 2008 → …
Semi automated die bonder
Equipment
01 January 2000 → …
Mask Aligner
Equipment
01 January 2008 → …
Hot roll laminator
Equipment
01 January 2014 → …
Digital microscope - Eclipse
Equipment