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Research Unit
NaMiFab - Cleanroom Facility for Nano- and MicroFabrication
Information
Members
Infrastructure
01 January 2005 → …
PDMS vacuum chamber
Equipment
01 January 2002 → …
Vapour phase reflow oven
Equipment
01 January 2005 → …
Multi-purpose oven
Equipment
01 June 2021 → …
Digital Inspection Microscope
Equipment
01 January 2012 → …
Oxygen Plasma Cleaner
Equipment
01 January 2024 → …
Backside Scribing tool
Equipment
01 January 2016 → …
Mask Aligner (6" wafers)
Equipment
01 November 2023 → …
Spray Coating System (8" wafers)
Equipment
01 November 2024 → …
Advanced Mask Aligner (8" wafers)
Equipment
01 January 2016 → …
High-Resolution E-Beam Lithography System
Equipment
01 October 2025 → …
Automated Electroplating & Wet Processing Tool (8" wafers)
Equipment
01 January 2000 → …
Reactive Ion Etcher (RIE)
Equipment
01 January 1995 → …
Oxygen plasma etcher
Equipment
01 January 2004 → …
Screen printer
Equipment
01 January 2006 → …
Quartz tube furnace
Equipment
01 January 1995 → …
Digital microscope - Optiphot
Equipment
01 January 1995 → …
Profilometer
Equipment
01 January 2021 → …
Parylene coater
Equipment
01 January 2019 → …
Thermal Atomic Layer Deposition system (ALD)
Equipment
01 January 2012 → …
Direct-write lithography system (LDI)
Equipment
01 January 2010 → …
UV source large
Equipment
01 January 2013 → …
Aerosol Jet printing system
Equipment
01 January 2014 → …
Multi-purpose oven
Equipment
01 January 2011 → …
Cross section polisher
Equipment
01 January 2011 → …
Laser micromachining system (3dmm)
Equipment
01 January 2012 → …
PDMS spinner
Equipment
01 July 2012 → …
Double-sided PCB UV exposure unit
Equipment
01 October 2009 → …
Reactive Ion Etching System
Equipment
01 July 2021 → …
Cryo-Enabled Deep Silicon Etcher
Equipment
01 July 2023 → …
High-Density ICPECVD System
Equipment
01 January 2024 → …
Precision Wafer Cleaving System
Equipment
01 October 2025 → …
Rapid Thermal Processing Furnace
Equipment
01 March 2025 → …
Automated Thin Film Mapping System (8" wafers)
Equipment
01 January 2011 → …
High-Precision Chip Placement System
Equipment
01 January 2000 → …
Sputter/Carbon Coater System for SEM samples
Equipment
01 January 2009 → …
Contact angle measurement system
Equipment
01 January 2008 → …
Optical profilometer - Wyko
Equipment
01 January 2010 → …
Liquid crystal cell filling setup
Equipment
01 July 2025 → …
Digital Inspection Microscope
Equipment
01 January 2005 → …
Thermal/sputtering evaporator
Equipment
01 January 2005 → …
Custom RTA System
Equipment
01 January 2025 → …
Semi-Automated Resist Processing System (8" wafers)
Equipment
01 July 2018 → …
Semi-Automatic Wire Bonder
Equipment
01 January 2016 → …
IV Characterization Setup
Equipment
01 January 1995 → …
RF-sputtering unit
Equipment
01 January 2008 → …
Wafer substrade bonding unit
Equipment
01 January 2010 → …
LC cell end seal press
Equipment
01 January 2005 → …
PDMS curing Oven
Equipment
01 April 2025 → …
XeF₂ Vapor Phase Etcher
Equipment
01 January 2012 → …
Plasma Enhanced Chemical Vapor Deposition system (PECVD)
Equipment
01 July 2020 → …
Multi-Wavelength Ellipsometer
Equipment
01 January 2007 → …
Plasma surface treatment system
Equipment
01 January 2006 → …
Oven with nitrogen flush
Equipment
01 January 2010 → …
UV source small
Equipment
01 January 2013 → …
Flex PCB Processing Line
Equipment
01 October 2009 → …
PECVD Thin Film Deposition System
Equipment
01 January 2024 → …
Laboratory Drying Oven
Equipment
01 January 2016 → …
Precision Lapping & Polishing System
Equipment
01 January 2016 → …
Wafer-Scale Optical Test Station (8"wafers)
Equipment
01 September 2024 → …
Fully-Automated Probe Station (8"wafers)
Equipment
01 January 2008 → …
HF Vapor Phase Etching System
Equipment
01 July 2006 → …
Compact Thermal Processing Oven (4" wafers)
Equipment
01 July 2006 → …
Compact Thermal Processing Oven (6" wafers)
Equipment
01 November 2023 → …
Wafer-scale micro-transfer printer (8" wafers)
Equipment
01 January 2014 → …
Digital Inspection Microscope
Equipment
01 July 2025 → …
Digital Inspection Microscope
Equipment
01 January 2005 → …
Thermal/e-gun evaporation unit
Equipment
01 January 1995 → …
DC Magnetron sputtering unit
Equipment
01 January 2012 → …
Wafer dicer
Equipment
01 January 2007 → …
Materials printer
Equipment
01 January 2005 → …
Vacuum laminating press
Equipment
01 January 2005 → …
Vacuum alloying furnace
Equipment
01 January 2011 → …
Wafer bonder - EVG
Equipment
01 July 2025 → …
3D additive nanofabrication system
Equipment
01 January 2000 → …
Wedge bonder
Equipment
01 July 2015 → …
Field emission scanning electron microscope (FEG-SEM) + EDX
Equipment
01 January 2015 → …
Mask Aligner (double sided)
Equipment
01 July 2008 → …
Film Applicator System (doctor blade coating)
Equipment
01 January 2012 → …
Photopolymer dry film laminator
Equipment
01 January 2013 → …
ICP Etching System
Equipment
01 January 2016 → …
Thin Film Thickness Measurement Microscope
Equipment
01 July 2025 → …
Multi-Source PVD deposition System (8" wafers)
Equipment
01 July 2025 → …
Wet Bench for Wafer Etching
Equipment
01 January 2005 → …
Critical Point Dryer
Equipment
01 March 2024 → …
Active Alignment & Gluing Station
Equipment
01 January 2008 → …
Wafer Bonder for Heterogeneous Integration (6" wafers)
Equipment
01 January 2006 → …
Scanning Electron Microscope (SEM) + EDX
Equipment
01 January 2008 → …
Precision Lapping and Polishing System
Equipment
01 January 2008 → …
Semi automated die bonder
Equipment
01 January 2000 → …
Mask Aligner
Equipment
01 January 2008 → …
Hot roll laminator
Equipment
01 January 2014 → …
Digital microscope - Eclipse
Equipment
01 January 2011 → …
Surface Profilometer
Equipment
01 January 2005 → …
E-Beam Evaporation System
Equipment
01 January 2005 → …
Mask Aligner with Backside Alignment (6" wafers)
Equipment
01 January 2016 → …
Micro-transfer printer
Equipment
01 January 2011 → …
Focused Ion Beam and Scanning Electron Microscope (FIB-SEM)
Equipment
01 January 2023 → …
Photonic Device Burn-In System
Equipment