Infrastructure

Backside Scribing tool

Type
Equipment
Acronym
FlibScribe
Code
APP/00237
Date of commissioning
01 January 2024 → …
Research disciplines
  • Natural sciences
    • Photonics, optoelectronics and optical communications
Keywords
backside scribe wafer scribing manual cleaving
Brand Name/manufacturer
Mercia Semiconductor
Other information
 
Description

Backside Scribing tool - Enables accurate cleaving through frontside targets with a scribe made on the backside of the substrate. - Scribe does not damage the front side of the sample. - Accuracy of scribe ±200 μm (achievable) - Capable of scribing bonded crystalline and amorphous wafers and chips for subsequent cleaving.