Type
Equipment
Acronym
Amicra MTP
Code
APP/00260
Date of commissioning
01 November 2023 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
chiplet integration
stamp transfer
micro-transfer printing
Brand Name/manufacturer
ASM AMICRA Microtechnologies
Other information
Description
The amicra wafer-scale micro-transfer printer handles up to 300mm substrates (both source and target). Maximum stamp size is limited to 20mm x 20mm and an alignment accuracy of +/- 0.5 micron 3sigma is specified.