Type
Equipment
Acronym
Home Made RTA
Code
APP/00241
Date of commissioning
01 January 2005 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
annealing
RTA
custom thermal processing
semiconductor heating
Brand Name/manufacturer
Custom-built system
Other information
Description
The home-made RTA (Rapid Thermal Annealer) is a custom-built system used to rapidly heat semiconductor wafers or materials to high temperatures for short durations, typically for processes like dopant activation, oxidation, or film crystallization.