Type
Equipment
Acronym
e-gun
Code
APP/00234
Date of commissioning
01 January 2005 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
electron beam evaporation
PVD
thin film deposition
Brand Name/manufacturer
Leybold L560
Other information
Description
Evaporation of insulating and conducting layers on diverse samples through heating with electron beam. Can be used for accurate deposition of thin metal layers or coatings.