Type
Equipment
Acronym
Tencor
Code
APP/00311
Date of commissioning
01 January 1995 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
nanometer resolution
stylus measurement
surface profiling
height detection
Brand Name/manufacturer
Tencor Alphastep 200
Other information
Description
Stylus profilometer for measuring surface height profiles on substrates, from hundreds of micrometers to tens of nanometers. Uses a needle probe to detect and calculate surface displacements.