Type
Equipment
Acronym
Leybold sputter
Code
APP/00291
Date of commissioning
01 January 1995 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
RF-sputtering
bias sputtering
thin film deposition
Brand Name/manufacturer
Leybold Hereaus Z550
Other information
Description
A high-vacuum sputtering system supporting DC, RF (high-frequency), and bias sputtering from three 203 mm targets. One position allows sputtering at elevated temperatures. An integrated etch mode enables substrate cleaning prior to deposition.