Type
Equipment
Acronym
SEM + EDS
Code
APP/00283
Date of commissioning
01 January 2006 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
scanning electron microscopy
elemental analysis
microstructure
energy dispersive x-ray spectroscopy
surface imaging
high magnification
Brand Name/manufacturer
JEOL JSM-5600
Other information
Description
A tungsten filament scanning electron microscope (SEM) equipped with detectors for secondary electrons, backscattered electrons, and cathodoluminescence. It enables surface imaging and elemental analysis via energy-dispersive X-ray spectroscopy (EDS)