Type
Equipment
Acronym
Univex 450
Code
APP/00235
Date of commissioning
01 January 2005 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
PVD
sputtering
thermal evaporation
thin film deposition
Brand Name/manufacturer
Leybold Univex 450
Other information
Description
The Leybold Univex 450 is a modular vacuum coating system used for thin film deposition via thermal evaporation and sputtering.