Type
Equipment
Acronym
SET aligner
Code
APP/00318
Date of commissioning
01 January 2000 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
UV exposure
photolithography
mask aligner
manual alignment
Brand Name/manufacturer
SET MG1410
Other information
Description
Handmatige mask aligner voor nauwkeurige UV-patroonoverdracht op met fotoresist gecoate substraten in fotolithografieprocessen.