Type
Equipment
Acronym
FEG-SEM
Code
APP/00325
Date of commissioning
01 July 2015 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
EDS
field emission SEM
elemental analysis
high resolution imaging
Brand Name/manufacturer
JEOL JSM_7000F
Other information
Description
A field emission gun scanning electron microscope (FEG-SEM) equipped with secondary and backscattered electron detectors for high-resolution surface imaging. It also supports elemental analysis via energy-dispersive X-ray spectroscopy (EDS). Compared to tungsten filament SEMs like the JSM-5600, the FEG-SEM provides sharper images at magnifications above ×20,000, though with longer analysis times, making it ideal for detailed microstructural studies.