Type
Equipment
Acronym
Wyko
Code
APP/00310
Date of commissioning
01 January 2008 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
sub-nanometer resolution
shape analysis
white light interferometry
surface mapping
surface roughness
Brand Name/manufacturer
Veeco Wyko NT3300
Other information
Description
A white light interferometer is capable of mapping a several millimeter wide area in a single measurement, with sub-nanometer resolution, providing instantaneous information about surface roughness, shape and waviness.