Type
Equipment
Acronym
N2 flush oven
Code
APP/00296
Date of commissioning
01 January 2006 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
nitrogen oven
inert atmosphere
oxidation-free
high temperature baking
thermal processing
Brand Name/manufacturer
Heraeus WU6100
Other information
Description
A nitrogen-flushed furnace for baking steps up to 450 °C in a slightly pressurized inert atmosphere. Ideal for thermal processing of sensitive materials requiring oxidation-free conditions.