Type
Equipment
Acronym
Coater SEM
Code
APP/00284
Date of commissioning
01 January 2000 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
conductive coating
carbon coating
gold coating
SEM sample preparation
thin film deposition
sputtering
Brand Name/manufacturer
SPI Module
Other information
Description
Small sputter coater / evaporator to to apply thin conductive layers of gold or carbon for SEM analysis and/or EDS analysis.