Type
Equipment
Acronym
Diener plasma
Code
APP/00287
Date of commissioning
01 January 2007 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
surface activation
substrate cleaning
plasma treatment
Brand Name/manufacturer
Diener Pico
Other information
Description
A compact plasma treatment unit for cleaning, activating or slightly etching substrares at room temperature.