Type
Equipment
Acronym
AV PECVD
Code
APP/00226
Date of commissioning
01 October 2009 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
dielectric films
plasma-enhanced CVD
thin film deposition
PECVD
Brand Name/manufacturer
Advanced Vacuum Vision 310 PECVD
Other information
Description
Plasma deposition system for accurate deposition of SiO2, Si3N4 and a-Si layers using a plasma enhanced chemical vapor deposition process.