Type
Equipment
Acronym
Logitech PM5
Code
APP/00301
Date of commissioning
01 January 2008 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
polishing
surface finishing
die preparation
lapping
opto-electronics
back-thinning
Brand Name/manufacturer
Logitech PM5
Other information
Description
The Logitech PM5 Lapping and Polishing Machine is a workstation that is used for the back-thinning of individual dies. The individual chip thinning technology was optimized for Silicon chips as well as for GaAs /InP Opto-Electronic components.