Type
Equipment
Acronym
ThetaMetrisis
Code
APP/00251
Date of commissioning
01 March 2025 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
thin film mapping
film uniformity
automated scanning
optical metrology
Brand Name/manufacturer
ThetaMetrisis - FR-Scanner-AIO XY200 UV/NI
Other information
Description
The thin-film mapper is a platform for the fully-automated in-depth characterization of patterned single and multilayer coatings on wafers. It provides 200mm of travel along X and Y axes while the measurements sample is secured on the stage through vacuum.