Type
Equipment
Acronym
Jipelec-RTA
Code
APP/00240
Date of commissioning
01 October 2025 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
RTP
thermal processing
semiconductor heating
rapid thermal annealing
Brand Name/manufacturer
Jipelec JetFirst 200 RTP
Other information
Description
The JetFirst RTP system is a compact and robust lamp furnace suitable for the Rapid Thermal Annealing (RTA) of silicon wafers with a size up to 200mm diameter.