Type
Equipment
Acronym
Unitemp - PI/BCB
Code
APP/00257
Date of commissioning
01 July 2006 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
compact oven
wafer heating
thermal processing
Brand Name/manufacturer
Unitemp RSS-450-110
Other information
Description
The Unitemp RSS-450-110 is a small oven used for thermal processing of PI or BCB. Maximum substrate size is 4 inch.