SEM (Scanning Electron Microscope) can be used for inspection of samples with resolution down to nanometer scale. The FIB (Focused Ion Beam) column can be used for making cross-sections in virtually any material and gives the option to look "into" the material. FIB also allows to directly pattern materials with nanometer resolution. Options include electron backscatter diffraction (EBSD, for evaluation of microstructure of material), several etch gas injectors, Auto-slice&View and nanomanipulators for TEM-slice preparation.