Type
Equipment
Acronym
Parylene coater
Code
APP/00322
Date of commissioning
01 January 2021 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
thin film depositon
biocompatible films
conformal coating
parylene deposition
Brand Name/manufacturer
Comelec CS-30
Other information
Description
Vacuum-based parylene deposition system for coating wafers and components with uniform, pinhole-free, biocompatible layers.