Type
Equipment
Acronym
Tegal
Code
APP/00294
Date of commissioning
01 January 1995 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
oxygen plasma
surface cleaning
plasma etching
ashing
organic material removal
Brand Name/manufacturer
Tegal 915
Other information
Description
An oxygen plasma etcher used for ashing and surface cleaning of organic materials.