Type
Equipment
Acronym
JEOL polisher
Code
APP/00324
Date of commissioning
01 January 2011 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
ion beam polishing
surface smoothing
cross section preparation
Brand Name/manufacturer
Jeol IB-09010CP
Other information
Description
Polishing cross-section surfaces by using an ion beam. This instrument uses accelerated Argon ions (at 2 to 6 kV) to precisely remove material from the sectioned sample.