Research disciplines
-
Engineering and technology
- Nanoelectronics
- Nanophotonics
- Micro- and nanoelectromechanical systems
- Microfabrication and manufacturing
- Nanofabrication and nanomanufacturing
Keywords
nanofabrication
microfabrication
cleanroom processing
Description
NaMiFab brings together the processing equipment and expertise for Nano- and Microfabrication of three Ghent University research groups from the departments INTEC (EA05) and ELIS (EA06) (Faculty of Engineering and Architecture):
Photonics Research Group (PRG)
Centre for Microsystems Technology (CMST)
Liquid Crystals and Photonics Group (LCP)
About 100 tools, used for fabrication and characterization at the nano- and micrometer scale, are located in the Ghent University cleanroom building at campus Ardoyen. This extensive set of instruments is relevant for e.g. applications in photonics, micro- and nanoelectronics, material research and biomedical engineering.