Type
Equipment
Acronym
Lesker-PVD
Code
APP/00239
Date of commissioning
01 July 2025 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
thin film deposition
PVD
multi-source deposition
Brand Name/manufacturer
Kurt J. Lesker PRO Line PVD 200
Other information
Description
The Kurt J. Lesker PRO Line PVD 200 is a modular, full featured thin film deposition system allowing 8" wafer transfer, 4 sputter cathodes and 6 e-beam pockets and eKLipse advanced control software.