Inventor of
METHOD FOR DEPOSITING A RUTHENIUM-CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS
Patent application(s)
WO2019158960
( 22 August 2019 )
Deposition tool for combinatorial thin film material libraries
Patent application(s)
WO2014125091
( 21 August 2014 )
Granted patent(s)
EP2956567
( 25 December 2019 )
Self cleaning gas sensor comprising catalytic nanoparticles in a nanoporous thin film
Patent application(s)
WO2014111586
( 24 July 2014 )
Methods for obtaining hydrophilic fluoropolymers
Patent application(s)
WO2014111492
( 24 July 2014 )
Granted patent(s)
EP2946028
( 26 December 2018 )
Coated nuclear reactor fuel particles
Patent application(s)
WO2011051447
( 05 May 2011 )
Granted patent(s)
EP2494557
( 05 March 2014 )
Atomic layer deposition powder coating
Patent application(s)
WO2010046373
( 29 April 2010 )
Granted patent(s)
EP2347031
( 14 March 2018 )
Enhancing catalytic activity of nanoporous materials
Patent application(s)
WO2009070855
( 11 June 2009 )
Granted patent(s)
EP2235232
( 11 July 2018 )