Research Explorer

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Researcher

Charlotte Van Bockstael

Awards & Distinctions

12 Results

2013

On the growth kinetics of Ni(Pt) silicide thin films

J DemeulemeesterD SmeetsCM ComrieNP BarradasA VieiraCharlotte Van BockstaelChristophe DetavernierK TemstA Vantomme

A1 Journal Article in JOURNAL OF APPLIED PHYSICS

2010

In situ study of the formation and properties of nickel silicides

Charlotte Van BockstaelChristophe Detavernier

In situ study of the formation of silicide phases in amorphous Co-Si mixed layers

Charlotte Van BockstaelKoen De KeyserJelle DemeulemeesterAndré VantommeRoland VanmeirhaegheChristophe DetavernierJean Jordan-SweetChristian Lavoie

A1 Journal Article in MICROELECTRONIC ENGINEERING

Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)

Koen De KeyserCharlotte Van BockstaelRoland VanmeirhaegheChristophe DetavernierE VerleysenH BenderW VandervorstJ Jordan-SweetC Lavoie

A1 Journal Article in APPLIED PHYSICS LETTERS

The influence of Pt redistribution on Ni1-xPtxSi growth properties

J DemeulemeesterD SmeetsCM ComrieCharlotte Van BockstaelWerner KnaepenChristophe DetavernierK TemstA Vantomme

A1 Journal Article in JOURNAL OF APPLIED PHYSICS

2009

In situ study of the formation of silicide phases in amorphous Ni-Si mixed layers

Charlotte Van BockstaelChristophe DetavernierRoland VanmeirhaegheJean Jordan-SweetChristian Lavoie

A1 Journal Article in Journal of Applied Physics

Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films

Charlotte Van BockstaelKoen De KeyserRoland Van MeirhaegheChristophe DetavernierJean Jordan-SweetChristian Lavoie

A1 Journal Article in Applied Physics Letters

2008

Effect of Pt addition on growth stress and thermal stress of NiSi films

Charlotte Van BockstaelKoen De KeyserDavy DeduytscheRoland Van MeirhaegheChristophe DetavernierJL JORDAN-SWEETC LAVOIE

A1 Journal Article in JOURNAL OF APPLIED PHYSICS

Epitaxial formation of a metastable hexagonal nickel-silicide

Koen De KeyserCharlotte Van BockstaelChristophe DetavernierRoland VanmeirhaegheJ JORDAN-SWEETC LAVOIE

A1 Journal Article in ELECTROCHEMICAL AND SOLID STATE LETTERS

Pt redistribution during Ni(Pt) silicide formation

Jelle DemeulemeesterDries SmeetsCharlotte Van BockstaelChristophe DetavernierCraig ComrieN BarradasArmando VieiraAndré Vantomme

A1 Journal Article in Applied Physics Letters

2007

Fundamentals of intrinsic stress during silicide formation

A ÖzcelikCharlotte Van BockstaelChristophe DetavernierRoland Vanmeirhaeghe

Stress evolution during Ni-Si compound formation for fully silicided (FUSI) gates

C TORREGIANICharlotte Van BockstaelChristophe DetavernierC LAVOIEA LAUWERSK MAEXJA KITTL

A1 Journal Article in MICROELECTRONIC ENGINEERING