Research Explorer

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Researcher

Aditya Chalishazar

Awards & Distinctions

3 Results

2025

Atomic layer deposition of aluminum phosphate layers using tris(dimethylamino)phosphine as P-precursor

Ruben BlommeAditya ChalishazarLowie HenderickFrans MunnikJohan MeersschautMatthias MinjauwChristophe DetavernierJolien Dendooven

U Journal Article in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Vapour phase deposition of phosphonate-containing alumina thin films using dimethyl vinylphosphonate as precursor

Juan Santo-Domingo PeñarandaArpan DharaAditya ChalishazarMatthias MinjauwJolien DendoovenChristophe Detavernier

U Journal Article in DALTON TRANSACTIONS

2024

Molecular Layer Deposition of Metal Organophosphonate Thin Films

Aditya ChalishazarArpan DharaJolien DendoovenChristophe Detavernier