Research Explorer

Your browser does not support JavaScript or JavaScript is not enabled. Without JavaScript some functions of this webapplication may be disabled or cause error messages. To enable JavaScript, please consult the manual of your browser or contact your system administrator.

Researcher

Aditya Chalishazar

Publications & Research Data

Awards & Distinctions

4 Results

2026

Polymer assisted area selective ALD of multilayered materials using alkylamine precursors

Nithin PoonkottilAditya ChalishazarHannes RijckaertChao PangDries Van ThourhoutChristophe DetavernierJolien Dendooven

U Journal Article in Journal of Vacuum Science & Technology A

2025

Atomic layer deposition of aluminum phosphate layers using tris(dimethylamino)phosphine as P-precursor

Ruben BlommeAditya ChalishazarLowie HenderickFrans MunnikJohan MeersschautMatthias MinjauwChristophe DetavernierJolien Dendooven

A1 Journal Article in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Vapour phase deposition of phosphonate-containing alumina thin films using dimethyl vinylphosphonate as precursor

Juan Santo-Domingo PeñarandaArpan DharaAditya ChalishazarMatthias MinjauwJolien DendoovenChristophe Detavernier

A1 Journal Article in DALTON TRANSACTIONS

2024

Molecular layer deposition of metal organophosphonate thin films

Aditya ChalishazarArpan DharaJolien DendoovenChristophe Detavernier