01 January 2014 → 31 December 2019
Research Foundation - Flanders (FWO)
- Condensed matter physics and nanophysics not elsewhere classified
- Physics of (fusion) plasmas and electric discharges
sputtering simulation elektron yield
In this project XPS will be used to retrieve the surface composition of the cathode used in magnetron sputtering. The information obtained with this technique will be used as starting point to calculate the sputter yield and the electron yield. The sputter yield will be computed using existing Monte Carlo software, while the electron yield will be calculated using first principles techniques.