Research Explorer

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Project

Quantification of target surfaces (QUOTAS)

Outputs and Outcomes

Code

3G021614

Duration

01 January 2014 → 31 December 2019

Funding

Research Foundation - Flanders (FWO)

Promotor

Diederik Depla

Research disciplines

Natural sciences
- Condensed matter physics and nanophysics not elsewhere classified
- Physics of (fusion) plasmas and electric discharges

Keywords

sputtering simulation elektron yield

Project description

In this project XPS will be used to retrieve the surface composition of the cathode used in magnetron sputtering. The information obtained with this technique will be used as starting point to calculate the sputter yield and the electron yield. The sputter yield will be computed using existing Monte Carlo software, while the electron yield will be calculated using first principles techniques.

English

Dutch

English

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