Code
bof/bas/2025/049
Duration
01 December 2025 → 30 November 2027
Funding
Regional and community funding: Special Research Fund
Promotor
Research disciplines
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Natural sciences
- Photonics, optoelectronics and optical communications
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Engineering and technology
- Nanophotonics
Keywords
NaMiFab
micro- and nanofabrication
chip technology
Project description
The NaMiFab core facility is a high-tech infrastructure for nano- and micro-fabrication technologies. Key processes involve the patterning of nanometer & micrometer-level thick films. Control over the thickness of these patterned structures is of crucial importance. Such measurements are carried out using a stylus profilometer, that scans a needle over the patterned structure to measure its height. Our current stylus profiler is end-of-life and is no longer supported by the company. Secondly, much of the research is scaling from samples to wafers (large industry-standard substrates). Therefore the new stylus profilometer should be able to handle these larger substrates as well.