In-situ x-ray based study of the nucleation and growth of metals during atomic layer deposition (ALD)

01 October 2014 → 30 September 2018
Regional and community funding: Special Research Fund, Research Foundation - Flanders (FWO)
Research disciplines
  • Natural sciences
    • Condensed matter physics and nanophysics
atomic layer deposition surface chemistry
Project description

A fundamental understanding of the surface chemistry and of key effects that control the initial nucleation and subsequent evolution of film morphology during metal-ALD will be achieved. As prototype systems, the focus will lie on three ALD chemistries for Ru and Ag. The experimental approach utilizes x-ray based surface-sensitive characterization techniques that can be applied in situ or without vacuum break.