An in-situ study of Molecular Layer Deposition of metalcone films and

01 October 2012 → 30 September 2016
Regional and community funding: Special Research Fund, Research Foundation - Flanders (FWO)
Research disciplines
  • Natural sciences
    • Condensed matter physics and nanophysics
Molecular layer deposition (MLD) metalcones thin films Atomic Layer Deposition (ALD) hybrid organic--‐inorganic films nanoporous films
Project description

The growth mechanism, conformality and transformation into nanoporous films of metalcone films will be studied using several in-­‐situ characterization techniques. Central topics for this research are the bonding of the organic precursor ,with the surface, the conformality on

high aspect ratio structures and the porosity of

the transformed metalcone layers.