Code
3F026012
Duration
01 October 2012 → 30 September 2016
Funding
Regional and community funding: Special Research Fund, Research Foundation - Flanders (FWO)
Promotor
Fellow
Research disciplines
-
Natural sciences
- Condensed matter physics and nanophysics
Keywords
Molecular layer deposition (MLD)
metalcones
thin films
Atomic Layer Deposition (ALD)
hybrid organic--‐inorganic films
nanoporous films
Project description
The growth mechanism, conformality and transformation into nanoporous films of metalcone films will be studied using several in-‐situ characterization techniques. Central topics for this research are the bonding of the organic precursor ,with the surface, the conformality on
high aspect ratio structures and the porosity of
the transformed metalcone layers.