Growth of complex oxides

01 May 2007 → 30 April 2011
Regional and community funding: various
Research disciplines
  • Natural sciences
    • Structural and mechanical properties
    • Physics of gases, plasmas and electric discharges not elsewhere classified
thin-film deposition reactive sputtering modelling of film growth complex oxides
Project description

“Growth of Complex Oxides” wishes to understand the growth of complex (or multi-component) oxides in detail by a full characterisation and modelling of the deposition process (reactive sputtering), in order to map all parameters influencing the layer growth process. Furthermore, the correlation between several selected film properties and the stoichiometry, microstructure and crystallographic alignment will be examined.