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Project

YESvGAN: Vertical GaN on Silicon: Wide Band Gap Power at Silicon Cost

Information

Project Team

Organisations

Outputs and Outcomes

Publications

Investigation of atomic layer deposition methods of Al2O3 on n-GaN

Liad TadmorSofie VandenbrouckeEldad Bahat TreidelEnrico BrusaterraPaul PlateNicole VolkmerFrank BrunnerChristophe DetavernierJoachim WurflOliver Hilt

A1 Journal Article in JOURNAL OF APPLIED PHYSICS

2024

In vacuo XPS study of Al2O3 ALD deposition processes on n-GaN

Sofie VandenbrouckeEldad Bahat TreidelLiad TadmorEnrico BrusaterraPaul PlateNicole BickelFrank BrunnerJoachim WürflOliver HiltJolien DendoovenChristophe Detavernier et al.

C3 Conference

2023