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Project

TIMERS : a Targeted Investigation of Momentary Effects during Reactive Sputtering

Information

Project Team

Outputs and Outcomes

Publications

Floating potential probes for process control during reactive magnetron sputtering

Josja Van BeverP. VašinaR. DrevetKoen StrijckmansDiederik Depla

A2 Journal Article in SURFACE AND COATINGS TECHNOLOGY

2024

Influence of chemisorption on the double hysteresis phenomenon during reactive sputtering

Josja Van BeverKoen StrijckmansDiederik Depla

A1 Journal Article in APPLIED SURFACE SCIENCE

2023

A computational study of the double hysteresis phenomenon during reactive sputtering

Josja Van BeverKoen StrijckmansDiederik Depla

A1 Journal Article in JOURNAL OF PHYSICS D-APPLIED PHYSICS

2022