Project

TIMERS : a Targeted Investigation of Momentary Effects during Reactive Sputtering

Acronym
TIMERS
Code
01J05319
Duration
01 December 2019 → 30 September 2024
Funding
Regional and community funding: Special Research Fund
Research disciplines
  • Natural sciences
    • Applied mathematics in specific fields not elsewhere classified
Keywords
Sputtering thin films magnetron modelling
 
Project description

Reactive magnetron sputtering is a commonly used deposition technique which shows an interesting, but not fully understood time dependency. The main goal of the project is to model the dynamics of the time dependent processes to result in an improved version of the reactive sputter deposition (RSD) model capable to tackle the most complicated processes.