Type
Equipment
Acronym
CPD
Code
APP/00245
Date of commissioning
01 January 2005 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
MEMS drying
CPD
critical point drying
supercritical CO₂
Brand Name/manufacturer
Leica CPD300
Other information
Description
Allows to release MEMS like structures (micromechanical structures)