Type
Equipment
Acronym
SPM
Code
APP/00244
Date of commissioning
01 July 2025 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
wafer wet etching
wafer cleaning
chemical processing
bench station
Brand Name/manufacturer
Electron MEC - SPM
Other information
Description
Wet bench for wafer-level wet etching (FeCl3, HCl, TMAH, HF, IK73/CA25) with integrated wafer rinsing and drying.