Type
Equipment
Acronym
AV RIE
Code
APP/00227
Date of commissioning
01 October 2009 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
RIE
semiconductor etching
plasma etching
anisotropic etching
Brand Name/manufacturer
Advanced Vacuum Vision 320 RIE
Other information
Description
RIE plasma etch system for etching of diverse materials including glasses, SiO2, Si3N4, Silicon, Germanium, polymers ...