Type
Equipment
Acronym
Vacuum oven
Code
APP/00297
Date of commissioning
01 January 2005 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
thermal treatment
alloying
forming gas
vacuum furnace
low pressure processing
Brand Name/manufacturer
Hereaus VT5042
Other information
Description
A vacuum alloying furnace for baking steps up to 400 °C in a low-pressure (~10⁻¹ mbar), neutral atmosphere. It supports vacuum, nitrogen, or forming gas (H₂-N₂) environments.