Type
Equipment
Acronym
Alcatel sputter
Code
APP/00289
Date of commissioning
01 January 1995 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
thin film deposition
reactive sputtering
DC magnetron sputtering
conductive materials
Brand Name/manufacturer
Alcatel SCM-6000
Other information
Description
A DC magnetron sputtering system for depositing conductive materials on flat substrates up to 6" in diameter. Primarily used for non-reactive sputtering, it also supports reactive sputtering with oxygen. The system uses a 203mm target for uniform thin film deposition.