Infrastructure
Automated Electroplating & Wet Processing Tool (8" wafers)
Type
Equipment
Acronym
ClassOne S8
Code
APP/00269
Date of commissioning
01 October 2025 → …
Organisation
Lead faculty
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
metal deposition
automated plating
wet processing
electroplating
ECD
Brand Name/manufacturer
ClassOne Solstice S8
Other information
Description
The Solstice® S8 automated electroplating systems are high-speed, fully-automated, 8-chambered tool designed for electrochemical deposition (ECD) as well as surface preparation wet processing – specifically for ≤200mm wafers. Our tool enables wafer cleaning (SC-1,SC-2), electroplating of Au, Cu, Sn an Ni, as well as seed layer etch and metal lift-off.