Type
Equipment
Acronym
Unitemp - BCB
Code
APP/00258
Date of commissioning
01 July 2006 → …
Research disciplines
-
Natural sciences
- Photonics, optoelectronics and optical communications
Keywords
wafer heating
annealing
compact oven
thermal processing
Brand Name/manufacturer
Unitemp
Other information
Description
The Unitemp is a small oven used for thermal processing of BCB only. Maximum substrate size is 6 inch.