Type
Equipment
Acronym
LDI
Code
APP/00327
Date of commissioning
01 January 2012 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
lithography
high resolution
laser direct imaging
photoresist exposure
maskless patterning
Brand Name/manufacturer
Heidelberg Instruments DWL-66FS
Other information
Description
Het Heidelberg DWL66 LDI-systeem gebruikt laser direct imaging om lichtgevoelige materialen te belichten met een resolutie tot 1 μm. Laser: 250 mW @ 355 nm.