Type
Equipment
Acronym
LDI
Code
APP/00327
Date of commissioning
01 January 2012 → …
Research disciplines
-
Engineering and technology
- Semiconductor devices, nanoelectronics and technology
Keywords
lithography
high resolution
laser direct imaging
photoresist exposure
maskless patterning
Brand Name/manufacturer
Heidelberg Instruments DWL-66FS
Other information
Description
The Heidelberg DWL66 LDI system uses laser direct imaging (LDI) to expose photosensitive materials with resolution down to 1 μm. Laser: 250mW @ 355nm.