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Onderzoeker
Wouter Leroy
Profiel
Projecten
Publicaties
Activiteiten
Prijzen & Erkenningen
75
Resultaten
2015
Study on reactive sputtering of yttrium oxide: process and thin film properties
Pei Lei
Wouter Leroy
Bing Dai
Jiaqi Zhu
Xiaoting Chen
Jiecai Han
Diederik Depla
A1
Artikel in een tijdschrift
in
SURFACE & COATINGS TECHNOLOGY
2015
2014
Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films
Sigelinde Van Steenberge
Wouter Leroy
Diederik Depla
A1
Artikel in een tijdschrift
in
THIN SOLID FILMS
2014
Influence of the target-substrate distance on the growth of YSZ thin films
Jérika Lamas
Wouter Leroy
Diederik Depla
A1
Artikel in een tijdschrift
in
SURFACE & COATINGS TECHNOLOGY
2014
Momentum transfer driven textural changes of CeO2 thin films
Sigelinde Van Steenberge
Wouter Leroy
A Hubin
Diederik Depla
A1
Artikel in een tijdschrift
in
APPLIED PHYSICS LETTERS
2014
The effect of negative oxygen ions on the growth of sputter deposited ceria thin films
Sigelinde Van Steenberge
Wouter Leroy
Diederik Depla
C3
Conferentie
2014
Using the macroscopic scale to predict the nano-scale behavior of YSZ thin films
Jérika Lamas
Wouter Leroy
Y-G Lu
J Verbeeck
G Van Tendeloo
Diederik Depla
A1
Artikel in een tijdschrift
in
SURFACE & COATINGS TECHNOLOGY
2014
2013
A growth model for sputter deposited ceria thin films
Sigelinde Van Steenberge
Wouter Leroy
Diederik Depla
C3
Conferentie
2013
How does redeposition influence reactive sputtering?
Koen Strijckmans
Wouter Leroy
Diederik Depla
C3
Conferentie
2013
Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films
Grégory Abadias
Wouter Leroy
Stijn Mahieu
Diederik Depla
A1
Artikel in een tijdschrift
in
JOURNAL OF PHYSICS D-APPLIED PHYSICS
2013
Linking functional properties of transition metals to growth parameters
Wouter Leroy
Diederik Depla
C3
Conferentie
2013
The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering
Francis Boydens
Wouter Leroy
Rosita Persoons
Diederik Depla
A1
Artikel in een tijdschrift
in
THIN SOLID FILMS
2013
Yttria-stabilized zirconia thin films as oxygen ion conductor for solid oxide fuel cells
Jérika Lamas
Wouter Leroy
Diederik Depla
C3
Conferentie
2013
2012
A dynamic simulation tool for reactive sputtering
Koen Strijckmans
Wouter Leroy
Diederik Depla
C3
Conferentie
2012
Angle-resolved energy flux measurements of a HIPIMS-powered rotating cylindrical magnetron in reactive and nonreactive atmosphere
Stephanos Konstantinidis
Wouter Leroy
Rony Snyders
Diederik Depla
C3
Conferentie
2012
Deposition of thin films by sputtering cold isostatically pressed powder targets: a case study
Francis Boydens
Wouter Leroy
Rosita Persoons
Diederik Depla
A1
Artikel in een tijdschrift
in
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
2012
Influence of target-substrate distance and composition on the preferential orientation of yttria-stabilized zirconia thin films
Jérika Lamas
Wouter Leroy
Diederik Depla
A1
Artikel in een tijdschrift
in
THIN SOLID FILMS
2012
Linking functional properties of transition metals to growth parameters
Wouter Leroy
Diederik Depla
C3
Conferentie
2012
Magnetron sputter deposition as visualized by Monte Carlo modeling
Diederik Depla
Wouter Leroy
A1
Artikel in een tijdschrift
in
THIN SOLID FILMS
2012
Modeling reactive magnetron sputtering: fixing the parameter set
Koen Strijckmans
Wouter Leroy
Roger De Gryse
Diederik Depla
A1
Artikel in een tijdschrift
in
SURFACE & COATINGS TECHNOLOGY
2012
Modeling the time dependency of the reactive sputter process
Koen Strijckmans
Wouter Leroy
Diederik Depla
C3
Conferentie
2012
Nanostructured thin films for solid oxide fuel cells: crystallographic properties
Jérika Lamas
Wouter Leroy
Diederik Depla
C3
Conferentie
2012
Nanostructured thin films of yttria-stabilized zirconia
Jérika Lamas
Wouter Leroy
Diederik Depla
C3
Conferentie
2012
The fictional transition of the preferential orientation of yttria-stabilized zirconia thin films
Jérika Lamas
Wouter Leroy
Diederik Depla
A1
Artikel in een tijdschrift
in
THIN SOLID FILMS
2012
Thirty years of rotatable magnetrons
Roger De Gryse
Johan Haemers
Wouter Leroy
Diederik Depla
A1
Artikel in een tijdschrift
in
THIN SOLID FILMS
2012
Understanding the growth of doped CeO2
Sigelinde Van Steenberge
Wouter Leroy
Diederik Depla
C3
Conferentie
2012
Understanding the growth of doped ceria thin films
Sigelinde Van Steenberge
Wouter Leroy
Diederik Depla
C3
Conferentie
2012
2011
A two-dimensional view on the preferential orientation of Yttria-Stabilized zirconia thin films
Jérika Lamas
Wouter Leroy
Diederik Depla
C3
Conferentie
2011
Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere
Wouter Leroy
Stephanos Konstantinidis
Stijn Mahieu
Rony Snyders
Diederik Depla
A1
Artikel in een tijdschrift
in
JOURNAL OF PHYSICS D-APPLIED PHYSICS
2011
Depositie van complexe materialen
Diederik Depla
Wouter Leroy
Redactioneel materiaal
2011
Fundamental aspects of home made targets for magnetron sputtering
Francis Boydens
Wouter Leroy
Rosita Persoons
Diederik Depla
C3
Conferentie
2011
Fundamental aspects of mixed oxide thin film growth
Marta Martins Saraiva
V Georgieva
N Jehanathan
Stijn Mahieu
Wouter Leroy
R Persoons
G Van Tendeloo
A Bogaerts
Diederik Depla
C3
Conferentie
2011
In search for the ultimate model parameters of reactive magnetron sputtering
Koen Strijckmans
Wouter Leroy
Diederik Depla
C3
Conferentie
2011
Reactive sputtering in 5D
Koen Strijckmans
Wouter Leroy
Diederik Depla
C3
Conferentie
2011
Smart textiles: an explorative study of the use of magnetron sputter deposition
Diederik Depla
Siegfried Segers
Wouter Leroy
Tom Van Hove
Marc Van Parys
A1
Artikel in een tijdschrift
in
TEXTILE RESEARCH JOURNAL
2011
Sputter deposited transition metal nitrides as back electrode for CIGS solar cells
Stijn Mahieu
Wouter Leroy
Koen Van Aeken
M Wolter
J Colaux
S Lucas
G Abadias
Paul Matthys
Diederik Depla
A1
Artikel in een tijdschrift
in
SOLAR ENERGY
2011
Sputter deposited transition metal nitrides as back electrode for CIGS solar cells
Wouter Leroy
Stijn Mahieu
Diederik Depla
C3
Conferentie
2011
The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering
Wouter Leroy
Diederik Depla
C3
Conferentie
2011
2010
Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides
Wouter Leroy
Stijn Mahieu
Rosita Persoons
Diederik Depla
C3
Conferentie
2010
Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition
Max Horkel
Koen Van Aeken
Christophe Eisenmenger-Sittner
Diederik Depla
Stijn Mahieu
Wouter Leroy
A1
Artikel in een tijdschrift
in
JOURNAL OF PHYSICS D-APPLIED PHYSICS
2010
Fixing the parameter set for reactive sputtering modelling
Koen Strijckmans
Wouter Leroy
Anemie Bogaerts
Diederik Depla
C3
Conferentie
2010
High power impulse magnetron sputtering using a rotating cylindrical magnetron
Wouter Leroy
Arutiun Ehiasarian
Stijn Mahieu
Diederik Depla
A1
Artikel in een tijdschrift
in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
2010
In search for the limits of rotating cylindrical magnetron sputtering
Wouter Leroy
Stijn Mahieu
Roger De Gryse
Diederik Depla
C3
Conferentie
2010
Powder mixtures as deposition targets for multicomponent thin films: a case study
Francis Boydens
Wouter Leroy
Diederik Depla
C3
Conferentie
2010
Powder mixtures as deposition targets for multicomponent thin films: a case study
Francis Boydens
Wouter Leroy
Diederik Depla
C3
Conferentie
2010
Putting a rotatable magnetron to the test with high power impulse magnetron sputtering
Wouter Leroy
Stijn Mahieu
Diederik Depla
Arutiun Ehiasarian
A4
Artikel in een tijdschrift
in
BELVAC NEWS
2010
Rotating cylindrical magnetron sputtering: simulation of the reactive process
Diederik Depla
Xiuyang Li
Stijn Mahieu
Koen Van Aeken
Wouter Leroy
Johan Haemers
Roger De Gryse
Annemie Bogaerts
A1
Artikel in een tijdschrift
in
JOURNAL OF APPLIED PHYSICS
2010
Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model
M Yusupov
E Bultinck
Marta Martins Saraiva
Wouter Leroy
Diederik Depla
A Bogaerts
C3
Conferentie
2010
2009
Influence of Al content on the properties of MgO grown by reactive magnetron sputtering
Marta Martins Saraiva
Chen Hong
Wouter Leroy
Stijn Mahieu
Neerushana Jehanathan
Oleg Lebedev
Violetta Georgieva
Rosita Persoons
Diederik Depla
A1
Artikel in een tijdschrift
in
PLASMA PROCESSES AND POLYMERS
2009
Investigation of the O- ion emission during reactive magnetron sputtering
Stijn Mahieu
Wouter Leroy
Diederik Depla
C3
Conferentie
2009
Linking reactive sputtering models to experimental reality by determining the real-time parameters
Wouter Leroy
Koen Van Aeken
Koen Strijckmans
Stijn Mahieu
Rosita Persoons
Diederik Depla
C3
Conferentie
2009
Linking reactive sputtering models to experimental reality by determining the real-time parameters
Wouter Leroy
Koen Van Aeken
Koen Strijckmans
Stijn Mahieu
Rosita Persoons
Diederik Depla
C3
Conferentie
2009
Magnetron sputter depositie van dunne filmen
Diederik Depla
Stijn Mahieu
Wouter Leroy
Hoofdstuk in een boek
in
Micro, macro, mega : collectie Ocsinberg, keerpunt in de geschiedenis van de microscopie
2009
Method to determine the sticking coefficient of O₂ on deposited Al during reactive magnetron sputtering, using mass spectrometry
Wouter Leroy
Stijn Mahieu
Rosita Persoons
Diederik Depla
A1
Artikel in een tijdschrift
in
PLASMA PROCESSES AND POLYMERS
2009
Modeling the flux of high energy negative ions during reactive magnetron sputtering
Stijn Mahieu
Wouter Leroy
Koen Van Aeken
Diederik Depla
A1
Artikel in een tijdschrift
in
JOURNAL OF APPLIED PHYSICS
2009
Quantification of the incorporation coefficient of a reactive gas on a metallic film during magnetron sputtering : the method and results
Wouter Leroy
Stijn Mahieu
Rosita Persoons
Diederik Depla
C3
Conferentie
2009
Quantification of the incorporation coefficient of a reactive gas on a metallic film during magnetron sputtering: the method and results
Wouter Leroy
Stijn Mahieu
Rosita Persoons
Diederik Depla
A1
Artikel in een tijdschrift
in
THIN SOLID FILMS
2009
Using Mass Spectrometry to gather some insights in the fundamentals if the reactive magnetron sputtering process of Al with O2
Wouter Leroy
Stijn Mahieu
Rosita Persoons
Diederik Depla
A4
Artikel in een tijdschrift
in
Nevac Blad
2009
2008
Characterization of Mg-Al oxides grown by reactive magnetron sputtering
Marta Martins Saraiva
Stijn Mahieu
Wouter Leroy
Rosita Persoons
Diederik Depla
C3
Conferentie
2008
Characterization of MgxAlyOz thin films grown by reactive magnetron sputtering
Marta Martins Saraiva
Hong Chen
Wouter Leroy
Stijn Mahieu
Neeru Jehanathan
Oleg Lebedev
Violetta Georgieva
Rosita Persoons
Diederik Depla
C3
Conferentie
2008
Diagnostics of an argon/oxygen magnetron plasma and comparison with Monte Carlo simulation
Mireille Gaillard
Laurent Schwaederlé
Stijn Mahieu
Wouter Leroy
Diederik Depla
Annemie Bogaerts
C3
Conferentie
2008
Influence of deposition on the reactive sputter behaviour during rotating cylindrical magnetron sputtering
XiuYang Li
Diederik Depla
Wouter Leroy
Johan Haemers
Roger De Gryse
A1
Artikel in een tijdschrift
in
JOURNAL OF PHYSICS D-APPLIED PHYSICS
2008
Noble gas retention in the target during rotating cylindrical magnetron sputtering
Stijn Mahieu
Wouter Leroy
Diederik Depla
S Schreiber
W Möller
A1
Artikel in een tijdschrift
in
APPLIED PHYSICS LETTERS
2008
Proceedings of ICTF 14 & RSD 2008
Boekeditor
2008
Some more equations describing reactive magnetron sputtering
Diederik Depla
Stijn Mahieu
Wouter Leroy
Johan Haemers
Roger De Gryse
C3
Conferentie
2008
Studying the reactive magnetron sputtering deposition of oxides, with mass spectrometry
Wouter Leroy
Stijn Mahieu
Yolanda Aranda-Gonzalvo
Diederik Depla
C3
Conferentie
2008
Templated growth of europium-doped sulfide thin films by a solvothermal method
Philippe Smet
Dirk Poelman
C3
Conferentie
2008
Using mass spectrometry to gather some insights in the fundamentals of the reactive magnetron sputtering process of Al with O2
Wouter Leroy
Stijn Mahieu
R Persoons
Diederik Depla
A4
Artikel in een tijdschrift
in
BELVAC NEWS
2008
2007
Depositing aluminium oxide to study reactive magnetron sputtering
Wouter Leroy
Stijn Mahieu
Diederik Depla
C3
Conferentie
2007
Thin film solid-state reactions forming carbides as contact materials for carbon-containing semiconductors
Wouter Leroy
Christophe Detavernier
Roland Vanmeirhaeghe
C LAVOIE
A1
Artikel in een tijdschrift
in
JOURNAL OF APPLIED PHYSICS
2007
2006
A fundamental study of advanced metal/semiconductor contacts
Wouter Leroy
Roland Vanmeirhaeghe
Christophe Detavernier
Proefschrift
2006
In-situ X-ray diffraction measurements for monitoring carbide and silicide phase formation
Wouter Leroy
Davy Deduytsche
Christophe Detavernier
Roland Vanmeirhaeghe
Dirk Poelman
C LAVOIE
C1
Conferentie
2006
In-situ X-ray diffraction measurements for monitoring carbide and silicide phase formation
Wouter Leroy
Davy Deduytsche
Christophe Detavernier
Roland Vanmeirhaeghe
Dirk Poelman
C LAVOIE
C1
Conferentie
2006
Solid-state formation of titanium carbide and molybdenum carbide as contacts for carbon-containing semiconductors
Wouter Leroy
Christophe Detavernier
Roland Vanmeirhaeghe
AJ KELLOCK
C LAVOIE
A1
Artikel in een tijdschrift
in
JOURNAL OF APPLIED PHYSICS
2006
2005
The barrier height inhomogeneity in identically prepared Au/n-GaAs Schottky barrier diodes
Wouter Leroy
Karl OPSOMER
Stefaan Forment
Roland Vanmeirhaeghe
A1
Artikel in een tijdschrift
in
SOLID-STATE ELECTRONICS
2005
2004
Influence of hydrogen treatment and annealing processes upon the Schottky barrier height of Au/n-GaAs and Ti/n-GaAs diodes
Stefaan Forment
M BIBER
Roland Vanmeirhaeghe
Wouter Leroy
A TURUT
A1
Artikel in een tijdschrift
in
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
2004