Research Explorer

Your browser does not support JavaScript or JavaScript is not enabled. Without JavaScript some functions of this webapplication may be disabled or cause error messages. To enable JavaScript, please consult the manual of your browser or contact your system administrator.

Researcher

Tanya Atanasova

Awards & Distinctions

7 Results

2013

Electrochemical determination of the cupric ion activity in aqeuous acidic cupric sulfate electrolytes

Tanya AtanasovaKatrien StrubbePhilippe M Vereecken

A1 Journal Article in JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Ultra-low copper baths for sub-35 nm copper interconnects

Tanya AtanasovaL CarbonellR CaluwaertsZs TõkeiKatrien StrubbePM Vereecken

A1 Journal Article in JOURNAL OF THE ELECTROCHEMICAL SOCIETY

2012

Ultra-low copper baths for sub-35 nm copper interconnects

Tanya AtanasovaKatrien StrubbeLaureen CarbonellRudy CaluwaertsZsolt TokeiPhilippe M Vereecken

2011

Adsorption/desorption of suppressor complex on copper : description of the critical potential

Tanya AtanasovaKatrien StrubbePhilippe M Vereecken

Ultra-low copper baths for sub-35 nm copper interconnects

Tanya AtanasovaKatrien StrubbeLaureen CarbonellRudy CaluwaertsZsolt TokeiPhilippe Vereecken

2010

Adsorption/desorption of suppressor complex on copper : descrition of the critical potential

Tanya AtanasovaKatrien StrubbePhilippe M Vereecken

2009

Physicochemical mechanism of Damascene copper plating : effect of suppressor

Tanya AtanasovaKatrien StrubbePhilippe M Vereecken