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Patents
Matthias Minjauw
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Patents
Inventor of
METHOD FOR DEPOSITING A RUTHENIUM-CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS
Patent application(s)
WO2019158960
( 21 August 2019 )
Patent application(s)
WO2019158960
( 21 August 2019 )
EP3737779
( 17 November 2020 )
Applicant(s)
Ghent University
ASM International (Netherlands)
Ghent University inventors
Christophe Detavernier
Jolien Dendooven
Matthias Minjauw
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